Wafer-scale micro-optics fabrication

@inproceedings{Voelkel2012WaferscaleMF,
  title={Wafer-scale micro-optics fabrication},
  author={Reinhard Voelkel},
  year={2012}
}
Abstract Micro-optics is an indispensable key enabling technology for many products and applications today. Probably the most prestigious examples are the diffractive light shaping elements used in high-end DUV lithography steppers. Highly-efficient refractive and diffractive micro-optical elements are used for precise beam and pupil shaping. Micro-optics had a major impact on the reduction of aberrations and diffraction effects in projection lithography, allowing a resolution enhancement from… Expand
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