Wafer preparation and iodine-ethanol passivation procedure for reproducible minority-carrier lifetime measurement

Abstract

We have determined that mechanisms of irreproducibility in measurement of lifetime arise from two sources: (i) improper wafer cleaning, and (ii) instability of I-E solution when in contact with a Si wafer. This paper describes a sequential optical oxidation and chemical cleaning procedure that can reproducibly yield the correct values of bulk lifetime. We… (More)

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