Wafer-level technology for sub-mm wave focal plane arrays

Abstract

A robust and compact scheme for building Submm-wave array receivers will be presented in this paper. By utilizing wafer-level integration the scheme enables compact multi-pixel modules. Bulk Silicon Deep Reactive Ion Etching techniques are used to build waveguides that allow the RF signals to be routed in the third dimension. Finally, a novel micro-lens… (More)

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