Wafer-Scale Aluminum Nanoplasmonic Resonators with Optimized Metal Deposition

@inproceedings{Liberman2016WaferScaleAN,
  title={Wafer-Scale Aluminum Nanoplasmonic Resonators with Optimized Metal Deposition},
  author={Vladimir Liberman and Kenneth Alexander Diest and C Stull and Matthew Cook and Donna M. Lennon and Mordechai and Mordechai Rothschild and Stefan Schoeche},
  year={2016}
}
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