Wafer Reliability Evaluation and Monitoring for InGaAsP Devices

@article{Verbitsky2006WaferRE,
  title={Wafer Reliability Evaluation and Monitoring for InGaAsP Devices},
  author={D. E. Verbitsky},
  journal={2006 IEEE International Integrated Reliability Workshop Final Report},
  year={2006},
  pages={201-204}
}
  • D. E. Verbitsky
  • Published 2006 in
    2006 IEEE International Integrated Reliability…
A simple procedure, evaluating wafer reliability by HALT before full regular processing, is justified and optimized. This procedure is aimed at early failure rate assessment, reliability adjustment, and yield enhancement per customer needs. A test plan concept, detailed design and realization are suggested. Test optimization with respect to customer requirements, field failures, and manufacturing losses are presented. Some regular flaws and recommendations are proposed. The procedure allows… CONTINUE READING