Wafer Classification Using Support Vector Machines

@article{Baly2012WaferCU,
  title={Wafer Classification Using Support Vector Machines},
  author={Ramy Baly and Hazem Hajj},
  journal={IEEE Transactions on Semiconductor Manufacturing},
  year={2012},
  volume={25},
  pages={373-383}
}
Increasing yield is a primary concern to integrated circuit manufacturing companies as it dictates the readiness of a new process for high volume manufacturing. In order to expedite the process of discovering yield issues, companies have started looking for ways to perform early prediction for such issues. This paper suggests the use of the support vector machines (SVMs) for early wafer classification. The choice of SVM is motivated by the model's ability to effectively classify multivariate… CONTINUE READING
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