Visual servoing of a mobile microrobot inside a scanning electron microscope

@article{Sievers2005VisualSO,
  title={Visual servoing of a mobile microrobot inside a scanning electron microscope},
  author={Torsten Sievers and Sergej Fatikow},
  journal={2005 IEEE/RSJ International Conference on Intelligent Robots and Systems},
  year={2005},
  pages={1350-1354}
}
Mobile microrobots with piezo slip-stick actuation and more than one degree of freedom mostly do not have internal pose sensors. One possibility for fast pose estimation with high accuracy is the application of external visual sensors like a video camera in combination with a light microscope or a scanning electron microscope (SEM). In particular, the use of a SEM makes high demands on the image processing. High update rates of the pose data enforce a short image acquisition time of the SEM… CONTINUE READING