Viewpoints 1 C Process Technology : VLSI and Beyond by Freder ic

@inproceedings{Schwettmann1982Viewpoints1C,
  title={Viewpoints 1 C Process Technology : VLSI and Beyond by Freder ic},
  author={N. Schwettmann},
  year={1982}
}
  • N. Schwettmann
  • Published 1982
Contents: Viewpoints †" 1C Process Technology: VLSI and Beyond, by Frederic N. Schwettmann and John L Moll The demand for ever-smaller device dimensions requires continual advances in 1C fabrication techniques. Here's where we stand today. Gary caused and Using three layers minimizes exposure variations caused by bulk and standing-wave effects. Silicon Integrated Circuits Using Beam-Recrystallized Polysilicon, by Theodore I. Kamins improves a thin layer of polysilicon to the melting point and… CONTINUE READING