Vibrations of narrow microbeams predeformed by an electric field

@inproceedings{Batraa2007VibrationsON,
  title={Vibrations of narrow microbeams predeformed by an electric field},
  author={R. C. Batraa and M. Porfirib and D. Spinelloa},
  year={2007}
}
  • R. C. Batraa, M. Porfirib, D. Spinelloa
  • Published 2007
Vibrations of a fixed–fixed narrow microbeam electrostatically actuated by applying a voltage difference to it and a parallel rigid conductor are analyzed. For gaps between the two conductors that are comparable to the beam’s thickness, the fundamental frequency of the beam may first increase with increasing applied voltage, before suddenly dropping at the pull-in voltage. Available models fail to accurately describe this behavior of the frequency versus voltage diagram for narrow microbeams… CONTINUE READING
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