Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry

@article{Caronti2002VibrationMO,
  title={Vibration maps of capacitive micromachined ultrasonic transducers by laser interferometry},
  author={Alessandro Caronti and Hicham Majjad and S. Ballandras and Giosu{\`e} Caliano and Riccardo Carotenuto and Antonio Iula and Vittorio Foglietti and Massimo Pappalardo},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2002},
  volume={49},
  pages={289-292}
}
A 1.8-mm /spl times/ 1.8-mm capacitive micromachined ultrasonic transducer (CMUT) element is experimentally characterized by means of optical measurements. Optical displacement measurements provide information on the resonant behavior of the single membranes and also allow us to investigate the dispersion in the frequency spectrum of adjacent membranes. In… CONTINUE READING