Vibrating RF MEMS for next generation wireless applications

  title={Vibrating RF MEMS for next generation wireless applications},
  author={Clark T.-C. Nguyen},
  journal={Proceedings of the IEEE 2004 Custom Integrated Circuits Conference (IEEE Cat. No.04CH37571)},
Micromechanical RF filters and reference oscillators based on recently demonstrated vibrating on-chip micromechanical resonators with Qs>10,000 at 1.5 GHz, are described as an attractive solution to the increasing count of RF components (e.g., filters) expected to be needed by future multi-band wireless devices. With Qs this high in on-chip abundance, such devices might also enable a paradigm-shift in transceiver design where the advantages of high-Q are emphasized, rather than suppressed… CONTINUE READING
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