Very-high-frequency probes for atomic force microscopy with silicon optomechanics

  title={Very-high-frequency probes for atomic force microscopy with silicon optomechanics},
  author={Lucien Schwab and P. E. Allain and Nicolas Mauran and Xavier Dollat and Laurent Mazenq and Denis Lagrange and Marc Gely and S{\'e}bastien Hentz and Guillaume Jourdan and Ivan Favero and Bernard Legrand},
  journal={Microsystems \& Nanoengineering},
Atomic force microscopy (AFM) has been consistently supporting nanosciences and nanotechnologies for over 30 years and is used in many fields from condensed matter physics to biology. It enables the measurement of very weak forces at the nanoscale, thus elucidating the interactions at play in fundamental processes. Here, we leverage the combined benefits of micro/nanoelectromechanical systems and cavity optomechanics to fabricate a sensor for dynamic mode AFM at a frequency above 100 MHz. This… 

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When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency

  • S. HoumadiB. Legrand M. Faucher
  • Physics, Engineering
    2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  • 2015
We show that the capacitive transduction of a MEMS device using a setup based on a microwave detection scheme achieves the measurement of the thermomechanical noise spectrum of a high-frequency (>10

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A frequency-dependent photonic sensor transfer function that accounts for thermo-optical dynamics and quantitatively describes the measured broadband optomechanical signal from an integrated photonic atomic force microscopy nanomechanicals probe is derived.