Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing

@inproceedings{Nayani1998ValidationAV,
  title={Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing},
  author={Nirupama Nayani and Mansooreh Mollaghasemi},
  booktitle={Winter Simulation Conference},
  year={1998}
}
Simulation modeling provides an effective and powe approach for capturing and analyzing comp manufacturing systems. More and more decisions are b on computer generated data derived from simulation. strength of these decisions is a direct function of the val of this data. Thus the need for efficient and objec methods to verify and validate simulation models is gre than ever. The validation of a simulation is gener acknowledged as an integral part of a simulation pro But in a vast majority of the… CONTINUE READING
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