Vacuum ultraviolet smoothing of nanometer-scale asperities of Poly(methyl methacrylate) surface

@article{Lapshin2010VacuumUS,
  title={Vacuum ultraviolet smoothing of nanometer-scale asperities of Poly(methyl methacrylate) surface},
  author={R. Lapshin and A. Alekhin and A. Kirilenko and S. L. Odintsov and V. A. Krotkov},
  journal={Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques},
  year={2010},
  volume={4},
  pages={1-11}
}
  • R. Lapshin, A. Alekhin, +2 authors V. A. Krotkov
  • Published 2010
  • Chemistry
  • Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
  • Smoothing of the nanometer-scale asperities of a poly(methyl methacrylate) (PMMA) film using vacuum ultraviolet (VUV) with the wavelength λ = 123.6 nm was studied. The exposure time and the residual air pressure in an working chamber were varied during the process of VUV treatment. A nanostructured surface of PMMA film is used as a sample to be exposed. The nanostructured surface of the PMMA film was obtained by treating the initially smooth spin-coated film in oxygen radio-frequency plasma… CONTINUE READING

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