Vacuum ultraviolet smoothing of nanometer-scale asperities of Poly(methyl methacrylate) surface

  title={Vacuum ultraviolet smoothing of nanometer-scale asperities of Poly(methyl methacrylate) surface},
  author={Rostislav V. Lapshin and Alexander P. Alekhin and Alina Kirilenko and Sergey L. Odintsov and V. A. Krotkov},
  journal={Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques},
Smoothing of the nanometer-scale asperities of a poly(methyl methacrylate) (PMMA) film using vacuum ultraviolet (VUV) with the wavelength λ = 123.6 nm was studied. The exposure time and the residual air pressure in an working chamber were varied during the process of VUV treatment. A nanostructured surface of PMMA film is used as a sample to be exposed. The nanostructured surface of the PMMA film was obtained by treating the initially smooth spin-coated film in oxygen radio-frequency plasma… 
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