Vacuum annealing phenomena in ultrathin TiDy/Pd bi-layer films evaporated on Si(100) as studied by TEM and XPS

@inproceedings{Lisowski2010VacuumAP,
  title={Vacuum annealing phenomena in ultrathin TiDy/Pd bi-layer films evaporated on Si(100) as studied by TEM and XPS},
  author={Wojciech Lisowski and Enrico G. Keim},
  booktitle={Analytical and bioanalytical chemistry},
  year={2010}
}
Using a combination of TEM and XPS, we made an analysis of the complex high-temperature annealing effect on ultrathin titanium deuteride (TiD(y)) films evaporated on a Si(100) substrate and covered by an ultrathin palladium layer. Both the preparation and annealing of the TiD(y)/Pd bi-layer films were performed in situ under UHV conditions. It was found… CONTINUE READING