VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors

@article{Arcamone2011VLSISM,
  title={VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors},
  author={Julien Arcamone and Antoine Niel and V. Gouttenoire and Michel Petitjean and Nadine David and R{\'e}gis Barattin and Muriel Matheron and Florence Ricoul and Thomas Bordy and H. M. le Blanc and J. Ruellan and Denis Mercier and N. Pereira-Rodrigues and Guillaume Costa and Vincent Agache and Sebastien Hentz and JC Gabriel and François Bal{\'e}ras and Carine Marcoux and Thomas Vernon Ernst and Laurent Duraffourg and Eric Colinet and E. B. Myers and M. L. Roukes and Philippe Andreucci and Eric Ollier and Pascal Puget},
  journal={2011 International Electron Devices Meeting},
  year={2011},
  pages={29.3.1-29.3.4}
}
This work demonstrates for the first time a VLSI-compatible nano/microfabricated, high-performance, portable multi-gas analyzer associating gas chromatography and NEMS resonators.