Utilization of SAGS Type 1 delivery systems in novel doping applications

@article{Despres2014UtilizationOS,
  title={Utilization of SAGS Type 1 delivery systems in novel doping applications},
  author={Joseph Despres and Greg Baumgart and Sharad Yedave and Barry Chambers},
  journal={2014 20th International Conference on Ion Implantation Technology (IIT)},
  year={2014},
  pages={1-4}
}
The advent of new technologies is driving the emergence of alternative doping methods. For instance, plasma doping is potentially a critical enabler for three-dimensional (3D) devices in the integrated circuit (IC) market, requiring flow rates much higher than those of traditional planar structures. Unlike traditional beam-line ion implantation, dopants are typically not introduced from an on-board gas box within the tool; rather they are distributed from a remote gas delivery system. This is… CONTINUE READING

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