• Materials Science
  • Published 2003

Using metastable argon atomic beam to fabricate nanostructures

@inproceedings{Yuanpei2003UsingMA,
  title={Using metastable argon atomic beam to fabricate nanostructures},
  author={Chen Yuan-pei},
  year={2003}
}
Fabrication of nanostructures is an important part of nanotechnology,and atom li thography technology is a new nanostructure fabrication method. A me tastable a rgon atomic beam generated by high-voltage discharge is collimated to minimize t he divergence angle of atomic beam.Metastable atoms are quenched when well-c ollimated beam travels through the light standing wave perpendicular to the prop agation direction of the atomic beam,and then deposited onto the substrate. SAM abso rbed on… CONTINUE READING