Using Micro-electroforming and Micro-assembly Technology to Fabricate Vertical Probe Card

Abstract

This paper is characterized by using MEMS process to fabricate and assemble vertical probe cards, and form their top and bottom guides in both vertical and horizontal directions simultaneously. Combining LIGA-like process with a novel CMP-like polishing process enables us to significantly promote the overall co-planarity of probe cards as exactly as within… (More)

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