Using Emulation to Validate a Cluster Tool Simulation Model

  title={Using Emulation to Validate a Cluster Tool Simulation Model},
  author={Jeffrey A. Joines and Russell R. Barton and Keebom Kang and Paul A. Fishwick},
Getting the most productivity per square foot of clean room space is a common goal for today’s semiconductor fabs. Cluster tool throughput is an important factor in a tool’s productivity index. Maximizing and accurately predicting throughput is a high priority in the cluster tool market. This paper presents a flexible and sufficiently accurate cluster tool simulation model. The simulation model can run as an emulator, using the real-world cluster tool scheduler (CTS), or as a stand-alone… CONTINUE READING
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