Using Destructive and Non-Destructive FIB-Based Techniques

  title={Using Destructive and Non-Destructive FIB-Based Techniques},
  author={Neal Magdefrau and Julie Wittenzellner and Daniel G Goberman and R. McLaughlin and Sreenivas N Bhattiprolu},
The introduction of improved, large area silicon drift detector (SDD) technology for energy dispersive spectrometry (EDS) along with advances in focused ion beam (FIB) techniques provides for a unique opportunity to perform chemical analysis of fine structures in 3-D. The improvements in data collection efficiency, increased count rates and better computing… CONTINUE READING