User's manual for the program MONSEL-1

  title={User's manual for the program MONSEL-1},
  author={J. Lowney and E. Marx},
9 Citations
Depth measurement technique for extremely deep holes using back-scattered electron images with high voltage CD-SEM
  • Highly Influenced
NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report | NIST
  • Highly Influenced
Investigation of secondary-emission signal formation in the low-voltage SEM mode
Sensitivity of SEM width measurements to model assumptions
  • 27
Monte Carlo modeling of secondary electron imaging in three dimensions
  • 45