9 Citations
Depth measurement technique for extremely deep holes using back-scattered electron images with high voltage CD-SEM
- Materials Science, Engineering
- Advanced Lithography
- 2019
- Highly Influenced
NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report | NIST
- Engineering
- 2011
- Highly Influenced
Investigation of secondary-emission signal formation in the low-voltage SEM mode
- Materials Science
- Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
- 2016
Modeling for accurate dimensional scanning electron microscope metrology: then and now.
- Physics, Medicine
- Scanning
- 2011
- 27
Sensitivity of SEM width measurements to model assumptions
- Materials Science, Engineering
- Advanced Lithography
- 2009
- 27
Monte Carlo modeling of secondary electron imaging in three dimensions
- Physics, Engineering
- SPIE Advanced Lithography
- 2007
- 45
Monte Carlo simulation for CD SEM calibration and algorithm development
- Engineering
- Advanced Lithography
- 1995
- 17