User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition | NIST

@inproceedings{Cassard2011UsersGF,
  title={User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition | NIST},
  author={Janet M. Cassard and Jon C. Geist and Theodore V. Vorburger and David Thomas Read and David George Seiler},
  year={2011}
}

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