Use of a theoretical model to investigate RF and DC reactive sputtering of titanium and chromium oxide coatings

@inproceedings{Martin1998UseOA,
  title={Use of a theoretical model to investigate RF and DC reactive sputtering of titanium and chromium oxide coatings},
  author={Nicolas Martin and Christophe Rousselot},
  year={1998}
}
Abstract An analysis of RF and DC reactive sputtering techniques is presented. The transition between a metal sputtering mode and a compound sputtering mode is usually noticed with a metallic target and an argon+oxygen gas mixture. The so-called hysteresis effect often observed for small amounts of reactive gas is explained in recent models. By considering gas kinetics parameters, it is possible to evaluate quite simple relationships between the main processing parameters. These theoretical… CONTINUE READING

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