Unveiling the shape-diversified silicon nanowires made by HF/HNO3 isotropic etching with the assistance of silver.

@article{Chen2015UnveilingTS,
  title={Unveiling the shape-diversified silicon nanowires made by HF/HNO3 isotropic etching with the assistance of silver.},
  author={C. Chen and C. Wong},
  journal={Nanoscale},
  year={2015},
  volume={7 3},
  pages={
          1216-23
        }
}
  • C. Chen, C. Wong
  • Published 2015
  • Materials Science, Medicine
  • Nanoscale
  • Hydrofluoric (HF)/nitric (HNO3)/acetic (CH3COOH) acid, normally referred to as the HNA method, is a widely utilized technique for performing isotropic etching on silicon (Si) in industrial Si-based processing and device construction. Here, we reported a novel etching strategy based on a HF/HNO3 process with the assistance of silver (Ag) nano-seeds, offering good controllability in preparing diversified Si nanostructure arrays with particularly smooth top surfaces. The involved mechanism was… CONTINUE READING
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