Unusual phenomena in CVD SiO2under sustained electron bombardment

@article{Dobkin1980UnusualPI,
  title={Unusual phenomena in CVD SiO2under sustained electron bombardment},
  author={D Dobkin and R C Kane},
  journal={IEEE Transactions on Electron Devices},
  year={1980},
  volume={27},
  pages={1841-1843}
}
SEM observations of passivating oxide after roughly 100 h of exposure to 10-12-keV, 1-10-mA/cm2electrons disclosed several unexpected phenomena, including smoothing and removal of the surface, perforation of the layer, and the growth of filaments at the edges of the illuminated regions. Possible explanations for the above are discussed.