Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

  title={Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system},
  author={Yongsheng Liu and Litong Zhang and Laifei Cheng and Qingfeng Zeng and Weihua Zhang and Wenbin Yang and Zu-de Feng and Siwei Li and Bin Zeng},
  journal={Applied Surface Science},
National Science Foundation of China [90405015, 50672076, 50425208, 50642039, 50802076]; Doctorate Foundation of Northwestern Polytechnical University [CX200505] 
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