Unified Theory Of Gas Damping Of Flexible Microcantilevers At Low Ambient Pressures

@inproceedings{Bidkar2012UnifiedTO,
  title={Unified Theory Of Gas Damping Of Flexible Microcantilevers At Low Ambient Pressures},
  author={Rahul A. Bidkar and Ryan C. Tung and Alina A. Alexeenko and Hartono Sumali and Arvind Raman},
  year={2012}
}
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10 With domain size parameter C y = C z = 130, and 225 by 332 grid points in the yz plane, the gas damping predictions converged within 2

  • 10 With domain size parameter C y = C z = 130…

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