Unambiguous identification of the NBTI recovery mechanism using ultra-fast temperature changes

Abstract

We study temperature and bias dependence of VTH and interface states recovery after NBTI (Negative Bias Temperature Instability) stress. By making use of in situ heated test structures, we are able to change the temperature quickly and reliably at any stage of the experiment while keeping the device bias conditions untouched. This tool enables us on the one… (More)

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