Ultraviolet imprinting and aligned ink-jet printing for multilayer patterning of electro-optic polymer modulators.

  title={Ultraviolet imprinting and aligned ink-jet printing for multilayer patterning of electro-optic polymer modulators.},
  author={Xiaohui Lin and Tao Ling and Harish Subbaraman and Xingyu Zhang and Kwangsub Byun and L. Jay Guo and Ray T. Chen},
  journal={Optics letters},
  volume={38 10},
The present work demonstrates an electro-optic polymer-based Mach-Zehnder (MZ) modulator fabricated utilizing advanced ultraviolet (UV) imprinting and aligned ink-jet printing technologies for patterning and layer deposition. The bottom electrode layer is designed and directly ink-jet printed on the substrate to form the patterned layer. The waveguide structure is formed into a bottom cladding polymer using a transparent flexible mold-based UV imprinting method. All other layers can be ink-jet… Expand
Printed polymer photonic devices for optical interconnect systems
A scalable roll-to-roll manufacturing scheme will enable the development of unique optoelectronic devices which can be used in a myriad of different applications, including communication, sensing, medicine, security, imaging, energy, lighting etc. Expand
Reconfigurable thermo-optic polymer switch based true-time-delay network utilizing imprinting and inkjet printing
The feasibility of developing very large-area photonic systems on both rigid and flexible substrates is demonstrated and a complete reconfigurable 4-bit true-time-delay module, comprising of an array of five interconnected TO switches and polymer delay lines, with a dimension of 25 mm × 18 mm is developed. Expand
Towards roll-to-roll manufacturing of polymer photonic devices
A novel process for fabricating polymer photonic devices using a combination of imprinting and ink jet printing methods, which provides high throughput on a variety of rigid and flexible substrates with low cost. Expand
Three dimensional polymer waveguide using hybrid lithography.
A three dimensional polymer waveguide with taper structure was demonstrated and fabricated by a reliable and effective hybrid lithography. The hybrid lithography consists of lithography to fabricateExpand
Demonstration of the one-step continuous fabrication of flexible polymer ridge waveguides via nanochannel-guided lithography
Abstract We demonstrate a facile one-step fabrication of flexible ridge waveguides by using the nanochannel-guided lithography (NCL) that enables continuous extrusion of a polymer that formsExpand
All-polymeric planar waveguide devices based on a gas-assisted thermal imprinting technique
In order to improve accuracy of replication and to simplify the fabrication process for imprinted all-polymeric planar optical waveguides and devices, the three-stage thermal imprinting techniqueExpand
Large area patterning of residue-free metal oxide nanostructures by liquid transfer imprint lithography.
Unlike the pattern fabricated by the conventional nanoimprint lithography method, in the case of the pattern formed by LTIL the residues accumulated between the patterns during the patterning procedure can be removed, and thus it is possible to easily form various types of nanostructures. Expand
Recent Progress of Imprinted Polymer Photonic Waveguide Devices and Applications
The recent progress of polymer photonic integrated devices fabricated using the UV imprinting technique is reviewed, and the electro-optic modulators, by virtue of the high EO coefficient of polymers, are described. Expand
Reconfigurable thermo-optic polymer switch based true-time-delay network utilizing imprinting and inkjet printing
  • Zeyu Pan, H. Subbaraman, +5 authors Ray T. Chen
  • Materials Science
  • 2014 Conference on Lasers and Electro-Optics (CLEO) - Laser Science to Photonic Applications
  • 2014
Reconfigurable true-time-delay lines, comprising of 2×2 thermo-optic polymer switches and rib waveguides are fabricated utilizing a combination of roll-to-roll (R2R) compatible UV imprinting andExpand
A straightforward electro-optic polymer covered titanium dioxide strip line modulator with a low driving voltage
An electro-optic (EO) modulator composed of an EO polymer/titanium dioxide (TiO2) hybrid waveguide has been designed and fabricated. By using a TiO2 strip line (0.3 × 0.3 μm2 cross-section) as theExpand


Printable thermo-optic polymer switches utilizing imprinting and ink-jet printing.
A printable Thermo-Optic (TO) switch utilizing imprinting and ink-jet printing techniques is demonstrated, demonstrating great potential for high throughput, roll-to-roll fabrication of low cost photonic devices. Expand
Fabrication of large-scaled organic light emitting devices on the flexible substrates using low-pressure imprinting lithography
This paper demonstrates an approach to fabricate large-scaled (70 /spl times/70 mm) patterned organic light-emitting devices (ITO/CuPc/NPB/Alq3/LiF/Al) on the flexible polyethyleneterephthalateExpand
Accelerated Publication: Patterning of polystyrene thin films by solvent-assisted imprint lithography and controlled dewetting
This paper presents an innovative approach for the preparation of polystyrene (PS) micropatterns by using solvent-assisted imprinting lithography and demonstrates a controlled dewetting process forExpand
Replica-molded electro-optic polymer Mach–Zehnder modulator
A Mach-Zehnder electro-optic polymer amplitude modulator is fabricated by a simple and high-throughput soft-stamp replica-molding technique. The modulator structure incorporates the highly nonlinearExpand
Effective in-device r33 of 735 pm/V on electro-optic polymer infiltrated silicon photonic crystal slot waveguides.
An effective in-device r(33) of 735 pm/V, which to the authors' knowledge is a record high, is demonstrated, which is ten times higher than the E-O coefficient achieved in thin film material. Expand
Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector
By carefully examining the different loss mechanisms in polymer micro-ring, it is found that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in these devices. Expand
Highly Linear Broadband Optical Modulator Based on Electro-Optic Polymer
In this paper, we present the design, fabrication, and characterization of a traveling-wave directional coupler modulator based on electro-optic polymer, which is able to provide both high linearityExpand
Bilayer Al wire-grids as broadband and high-performance polarizers.
Simulations using a finite-difference time-domain algorithm are in agreement with the experimental results and show that the transmission spectra are governed by Fabry-Perot interference and nearfield coupling between the two layers of the structure. Expand
High-sensitivity and wide-directivity ultrasound detection using high Q polymer microring resonators.
By combining a resist reflow and a low bias continuous etching and passivation process in mold fabrication, imprinted polymer microrings with drastically improved sidewall smoothness were obtained. Expand
Broadband electro-optic polymer modulators with high electro-optic activity and low poling induced optical loss
A screening method is reported for electro-optic (EO) polymers with an emphasis on broadband device suitability. The method is based on comparing the signal from second harmonic generation (SHG) andExpand