Ultraviolet imprinting and aligned ink-jet printing for multilayer patterning of electro-optic polymer modulators.

@article{Lin2013UltravioletIA,
  title={Ultraviolet imprinting and aligned ink-jet printing for multilayer patterning of electro-optic polymer modulators.},
  author={Xiaohui Lin and Tao Ling and Harish Subbaraman and Xingyu Zhang and Kwangsub Byun and L. Jay Guo and Ray T. Chen},
  journal={Optics letters},
  year={2013},
  volume={38 10},
  pages={
          1597-9
        }
}
The present work demonstrates an electro-optic polymer-based Mach-Zehnder (MZ) modulator fabricated utilizing advanced ultraviolet (UV) imprinting and aligned ink-jet printing technologies for patterning and layer deposition. The bottom electrode layer is designed and directly ink-jet printed on the substrate to form the patterned layer. The waveguide structure is formed into a bottom cladding polymer using a transparent flexible mold-based UV imprinting method. All other layers can be ink-jet… Expand
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