Ultrasonic electrostatic actuators on a flexible substrate

@article{Kim2012UltrasonicEA,
  title={Ultrasonic electrostatic actuators on a flexible substrate},
  author={Sangpyeong Kim and Xu Zhang and Richard D. Daugherty and Eduardo J. H. Lee and George R. Kunnen and David R. Allee and Eric W. Forsythe and Junseok Chae},
  journal={2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2012},
  pages={1193-1196}
}
We present a MEMS-based electrostatic actuator on a flexible substrate, made of Polyethylene Naphthalate (PEN), which emits acoustic waves at ultrasonic frequencies, aiming for an ultrasound microdevice for equipment inspection. The actuator has a suspended diaphragm, made of parylene, of 2-6 mm diameter and a 6 μm gap between the diaphragm and substrate. A single actuator emits ultrasonic waves at 25 kHz, and pressure of 27 dB SPL (sound pressure level) and a 1 × 2 array emits up to 34.6 dB… CONTINUE READING

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