Ultrafast Accelerated Retention Test Methodology for RRAM Using Micro Thermal Stage

Abstract

We proposed an ultrafast accelerated retention test methodology for resistive random access memory (RRAM) using micro thermal stage (MTS). For accelerated retention test using chuck heating, the two major factors that limit the test speed are the attainable temperature range and thermal time constant. To extend these limits, we built MTS with extended… (More)

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