Ultracompact On-Chip Multiplexed Sensor Array Based on Dense Integration of Flexible 1-D Photonic Crystal Nanobeam Cavity With Large Free Spectral Range and High Q-Factor


A method for the dense integration of one-dimensional (1-D) photonic crystal nanobeam cavity (PCNC) based integrated sensor array (1-D-PCNC-ISA) is proposed. The 1-D-PCNC-ISA consists of multiple parallel-connected sensing channels with airgap separations. On each channel, only a single flexible 1-D-PCNC sensor with large free spectral range (FSR) and high… (More)

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