Ultra-thin multilayer nanomembranes for short wavelength deformable optics

@article{Tripp2004UltrathinMN,
  title={Ultra-thin multilayer nanomembranes for short wavelength deformable optics},
  author={M. K. Tripp and C S Herrmann and S. George and V. Bright},
  journal={17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest},
  year={2004},
  pages={77-80}
}
Due to their unique optical properties, deformable multilayer membranes are of interest for adaptive optics. In this paper, we present the fabrication and characterization of a deformable membrane with nanometer scale thickness. This work explores the creation of adaptive optics out of multilayer thin films deposited using atomic layer deposition (ALD… CONTINUE READING