Ultra thin film encapsulation of OLED on plastic substrate

  title={Ultra thin film encapsulation of OLED on plastic substrate},
  author={Sang-Hee Ko Park and Jiyoung Oh and Chi-Sun Hwang and Yong Suk Yang and Jeong-Ik Lee and Hye Yong Chu},
  journal={Journal of Information Display},
  pages={30 - 34}
Abstract Fabrications of barrier layer on a polyethersulfon (PES) film and OLED based on a plastic substrate by atomic layer deposition (ALD) have been carried out. Simultaneous deposition of 30 nm of AlOx film on both sides of PES film gave film MOCON value of 0.0615 g/m2/day (@38°C, 100 % R.H.). Moreover, the double layer of 200 nm SiNx film deposited by PECVD and 20 nm of AlOx film by ALD resulted in the MOCON value lower than the detection limit of MOCON. The OLED encapsulation performance… 
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in Proc
  • Society for Information Display (2004), p.