Ultra-high density floating gate devices using self-assembled 2D arrays of gold nanoparticles

Abstract

We present a method for fabricating ultrahigh density floating gate devices using highly ordered 2D arrays of gold nanoparticles (8×1011 particles/cm2) as the charge storage nodes. The removal of polystyrene ligands, after array formation, was essential for obtaining reliable memory window. Surprisingly, the memory window of devices using arrays with 4 nm… (More)

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