Ultra-fine Tracking Control on Piezoelectric Actuated Motion Stage Using Piezoelectric Hysteretic Model

  title={Ultra-fine Tracking Control on Piezoelectric Actuated Motion Stage Using Piezoelectric Hysteretic Model},
  author={Yi-Cheng Huang and D. Lin},
The tracking control accuracy of the piezoelectric actuator (PEA) is limited due to its inherent hysteresis nonlinearity. A new piezoelectric-actuator model is synthesized based on two first-order transfer systems in parallel with two tuned parameters determined from one experiment. Two open-loop tracking controllers are implemented with the proposed model to compensate the hysteresis of linear positioning. Numerical simulations and experimental tests on the tracking of sinusoidal and… CONTINUE READING
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