Ultra-Thin Piezoelectric Strain Sensor Array Integrated on a Flexible Printed Circuit Involving Transfer Printing Methods

Abstract

In this paper, we present a novel sensor array manufacturing process that involves transfer printing methods using a chip mounter with a vacuum collet. Using these methods, one can mount not only ultra-thin microsensors but also microcontroller and amplifier chips required for sensor device fabrication. We successfully transfer-printed a very fragile… (More)

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