Ubiquitous Relaxation in Bti Stressing—new Evaluation and Insights

Abstract

The ubiquity of threshold voltage relaxation is demonstrated in samples with both conventional and high-k dielectrics following various stress conditions. A technique based on recording short traces of relaxation during each measurement phase of a standard measure-stress-measure sequence allows monitoring and correcting for the otherwise-unknown relaxation… (More)

Topics

14 Figures and Tables

Statistics

010203020082009201020112012201320142015201620172018
Citations per Year

153 Citations

Semantic Scholar estimates that this publication has 153 citations based on the available data.

See our FAQ for additional information.

Cite this paper

@inproceedings{Kaczer2008UbiquitousRI, title={Ubiquitous Relaxation in Bti Stressing—new Evaluation and Insights}, author={Ben Kaczer and Tibor Grasser and Ph. J. Roussel and Javier Mart{\'i}n-Mart{\'i}nez and R. O’Connor and Brendan John O’Sullivan and Guido. Groeseneken}, year={2008} }