UV-nanoimprint lithography: structure, materials and fabrication of flexible molds.

Abstract

Large-area nanopatterning technology has demonstrated high potential which can significantly enhance the performance of a variety of devices and products such as LEDs, solar cells, hard disk drives, laser diodes, wafer-level optics, etc. But various existing patterning technologies cannot well meet industrial-level application requirements in term of high… (More)

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Cite this paper

@article{Lan2013UVnanoimprintLS, title={UV-nanoimprint lithography: structure, materials and fabrication of flexible molds.}, author={Hongbo Lan and Hongzhong Liu}, journal={Journal of nanoscience and nanotechnology}, year={2013}, volume={13 5}, pages={3145-72} }