Typeset Using Revt E X 1

Abstract

A new combined PIC-MCC approach is developed for accurate and fast simulation of a radio frequency discharge at low gas pressure and high density of plasma. Test calculations of α−γ transition in a ccrf discharge in helium and argon show a good agreement with experimental data. We demonstrate high efficiency of the combined PIC-MCC algorithm, especially for the collisionless regime of electron heating. 52.27.Aj; 52.65.Ww; 52.80.Pi Typeset using REVTEX

Cite this paper

@inproceedings{Schweigert2003TypesetUR, title={Typeset Using Revt E X 1}, author={Igor V Schweigert and V . A . Schweigert}, year={2003} }