Two-layer process for a micro thermoelectric cross-plane generator with electroplating and reflow soldering

  title={Two-layer process for a micro thermoelectric cross-plane generator with electroplating and reflow soldering},
  author={Reinhard Roth and Raimar Rostek and Gabriel Lenk and M. Kratschmer and Keith Cobry and Peter Woias},
  journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)},
This paper addresses the design, modeling, and fabrication of a micro-thermoelectric cross-plane generator with electroplated materials. Bi2Te3 is used as n-type material, while Cu is used as p-type material. Deposition of both materials on seed layers with the same electrical potential was realized by a two-layer process with SU-8 as permanent photoresist and a second resist that is laminated on the SU-8 twice. The upper electrical contacts of the 71 thermocouples connected electrically in… CONTINUE READING


Publications referenced by this paper.
Showing 1-10 of 13 references


  • Y. C. Lan, D. Z. Wang, G. Chen
  • F. Ren, "Diffusion of nickel and tin in p-type…
  • 2008
Highly Influential
7 Excerpts

A new generation of high performance large-scale and flexible thermogenerators based on (Bi,Sb)2(Te,Se)3 nano-powders using the spark plasma sintering technique

  • G. Delaizir
  • Sens. Actuators, A,
  • 2012
1 Excerpt

Development of a Bi2Te3based thermoelectric generator with high-aspect ratio, free-standing legs

  • D. E. Wesolowski
  • J. Mater. Res.,
  • 2012
2 Excerpts

Influence of vapor annealing on the thermoelectric properties of electrodeposited Bi2Te3

  • R. Rostek, V. Sklyarenko, P. Woias
  • J. Mater. Res., vol. 26, pp. 1785-1790
  • 2011
1 Excerpt

Optimization and fabrication of a thick printed thermoelectric device

  • C. Navone, M. Soulier, J. Testard, J. Simon, T. Caroff
  • J. Electron. Mater., vol. 40, pp. 789-793
  • 2011
1 Excerpt

Novel mixed method for the electrochemical deposition of thick layers of Bi2+xTe3-x with controlled stoichiometry

  • W. Glatz, L. Durrer, E. Schwyter, C. Hierold
  • Electrochim. Acta, vol. 54, pp. 755- 762
  • 2008
1 Excerpt

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