Two-layer process for a micro thermoelectric cross-plane generator with electroplating and reflow soldering

@article{Roth2013TwolayerPF,
  title={Two-layer process for a micro thermoelectric cross-plane generator with electroplating and reflow soldering},
  author={Reinhard Roth and Raimar Rostek and Gabriel Lenk and M. Kratschmer and Keith Cobry and Peter Woias},
  journal={2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)},
  year={2013},
  pages={486-489}
}
This paper addresses the design, modeling, and fabrication of a micro-thermoelectric cross-plane generator with electroplated materials. Bi2Te3 is used as n-type material, while Cu is used as p-type material. Deposition of both materials on seed layers with the same electrical potential was realized by a two-layer process with SU-8 as permanent photoresist and a second resist that is laminated on the SU-8 twice. The upper electrical contacts of the 71 thermocouples connected electrically in… CONTINUE READING

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