Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication

@article{Chen2003TwodimensionalMO,
  title={Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication},
  author={Kun S. Chen and Greg Evans},
  journal={Microsystem Technologies},
  year={2003},
  volume={10},
  pages={444-450}
}
Two-dimensional processes of nickel electrodeposition in LIGA microfabrication were modeled using the finite-element method and a fully coupled implicit solution scheme via Newton’s technique. Species concentrations, electrolyte potential, flow field, and positions of the moving deposition surfaces were computed by solving the species-mass, charge, and momentum conservation equations as well as pseudo-solid mesh-motion equations that employ an arbitrary Lagrangian-Eulerian (ALE) formulation… CONTINUE READING

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