Two Novel Structures for Tunable Mems Capacitor with Rf Applications

Abstract

Abstract—Two novel structures for high-Q MEMS tumble capacitors are presented. The proposed designs include full plate as well as the comb structured capacitors. They can be fabricated employing surface micromachining technology which is CMOS-compatible. The structures do not require the cantilever beams which introduce considerable series resistance to the… (More)

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