Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

@inproceedings{Tan2017TwoDimensionalMA,
  title={Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors},
  author={Xinran Tan and Fan Zhu and Chao Wang and Yang Yu and Jian Shi and Xue Qi and Feng Yuan and Jiubin Tan},
  booktitle={Sensors},
  year={2017}
}
This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The principal error of the capacitive sensor for precision… CONTINUE READING