Two-Axis Gimbal-Less Electrothermal Micromirror for Large-Angle Circumferential Scanning

@article{Xu2009TwoAxisGE,
  title={Two-Axis Gimbal-Less Electrothermal Micromirror for Large-Angle Circumferential Scanning},
  author={Yingshun Xu and Jai Prakash Singh and T. Selvaratnam and Nanguang Chen},
  journal={IEEE Journal of Selected Topics in Quantum Electronics},
  year={2009},
  volume={15},
  pages={1432-1438}
}
In this paper, we present the design, simulation, fabrication, and characterization of a two-axis gimbal-less micromirror optimized for large-angle circumferential scanning applications. The single-crystal silicon micromirror consists of novel folded bimorph electrothermal actuators, flexural springs, and a mirror plate coated with a high-reflective Cr/Au thin film. A modified silicon-on-insulator microelectromechanical system process has been applied on the micromirror fabrication. The single… CONTINUE READING

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The single - crystal silicon micromirror consists of novel folded bimorph electrothermal actuators , flexural springs , and a mirror plate coated with a high - reflective Cr / Au thin film .
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The single - crystal silicon micromirror consists of novel folded bimorph electrothermal actuators , flexural springs , and a mirror plate coated with a high - reflective Cr / Au thin film .
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