Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors

  title={Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors},
  author={Adriana E Lita and Danna Rosenberg and Sae Woo Nam and A.J. Miller and Davor Balzar and Lisa Kaatz and Robert E. Schwall},
  journal={IEEE Transactions on Applied Superconductivity},
Tungsten thin films can form in one of two crystal structures: alpha (bcc), with a superconducting transition temperature (T/sub c/) of 15 mK, and beta (A15), with a T/sub c/ between 1 and 4 K. Films with intermediate T/sub c/s are composed of both alpha and beta phases. We have investigated how to tune the film T/sub c/ in order to obtain certain values (T/sub c/ /spl sim/ 100 mK) suitable for the fabrication of photon number resolving transition-edge sensor (TES) and arrays of TES detectors… 

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