Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors
@article{Lita2005TuningOT, title={Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors}, author={A. E. Lita and D. Rosenberg and S. Nam and A. Miller and D. Balzar and L. Kaatz and R. Schwall}, journal={IEEE Transactions on Applied Superconductivity}, year={2005}, volume={15}, pages={3528-3531} }
Tungsten thin films can form in one of two crystal structures: alpha (bcc), with a superconducting transition temperature (T/sub c/) of 15 mK, and beta (A15), with a T/sub c/ between 1 and 4 K. Films with intermediate T/sub c/s are composed of both alpha and beta phases. We have investigated how to tune the film T/sub c/ in order to obtain certain values (T/sub c/ /spl sim/ 100 mK) suitable for the fabrication of photon number resolving transition-edge sensor (TES) and arrays of TES detectors… CONTINUE READING
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References
SHOWING 1-10 OF 18 REFERENCES
Phase transformation of thin sputter-deposited tungsten films at room temperature
- Materials Science
- 2002
- 118
Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering
- Physics
- 1973
- 170
Performance of photon-number resolving transition-edge sensors with integrated 1550 nm resonant cavities
- Physics
- IEEE Transactions on Applied Superconductivity
- 2005
- 55
Detection of single infrared, optical, and ultraviolet photons using superconducting transition edge sensors
- Physics
- 1998
- 277