Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors

@article{Lita2005TuningOT,
  title={Tuning of tungsten thin film superconducting transition temperature for fabrication of photon number resolving detectors},
  author={Adriana E Lita and Danna Rosenberg and Sae Woo Nam and A.J. Miller and Davor Balzar and Lisa Kaatz and Robert E. Schwall},
  journal={IEEE Transactions on Applied Superconductivity},
  year={2005},
  volume={15},
  pages={3528-3531}
}
Tungsten thin films can form in one of two crystal structures: alpha (bcc), with a superconducting transition temperature (T/sub c/) of 15 mK, and beta (A15), with a T/sub c/ between 1 and 4 K. Films with intermediate T/sub c/s are composed of both alpha and beta phases. We have investigated how to tune the film T/sub c/ in order to obtain certain values (T/sub c/ /spl sim/ 100 mK) suitable for the fabrication of photon number resolving transition-edge sensor (TES) and arrays of TES detectors… 

Figures from this paper

Properties of Tungsten Thin Films Produced with the RF-Sputtering Technique
Abstract For the purpose of building very sensitive light and phonon detectors, as e.g. applied in the Dark Matter (DM) experiment CRESST (Cryogenic Rare Event Search with Superconducting
Tungsten Silicide Alloys for Microwave Kinetic Inductance Detectors
Microwave kinetic inductance detectors are used to detect photons over a large range of wavelengths from submillimeter to X-ray. The common material requirements for this application are: high
Structure and morphology of magnetron sputtered W films studied by x-ray methods
The structural and morphological studies of a number of tungsten (W) thin films were carried out using grazing incidence x-ray diffraction, x-ray reflectivity and grazing incidence small-angle x-ray
Thin film ruthenium microstructures for transition edge sensors
The superconducting properties of ruthenium (Ru) thin films and microstructures are investigated. The microstructures are used as transition edge sensors (TES), working at He-3 evaporation cryostats’
Deposition of Tungsten Thin Films by Magnetron Sputtering for Large-Scale Production of Tungsten-Based Transition-Edge Sensors
To cope with the foreseen demand for tungsten-based TESs in the current and future phases of the CRESST experiment, we investigated the possibility to implement a reliable, simple and reproducible
Confocal sputtering of conformal α-β phase W films on etched Al features
The authors report on thin-film processing improvements in the fabrication of superconducting quasiparticle-trap-assisted electrothermal-feedback transition-edge sensors used in the design of
Comparison of tungsten films grown by CVD and hot-wire assisted atomic layer deposition in a cold-wall reactor
In this work, the authors developed hot-wire assisted atomic layer deposition (HWALD) to deposit tungsten (W) with a tungsten filament heated up to 1700–2000 C. Atomic hydrogen (at-H) was generated
A superconducting microcalorimeter for low-flux detection of near-infrared single photons
This thesis covers the development and the characterization of a single photon detector based on a superconducting microcalorimeter. The detector development is motivated by the Any Light Particle
Comparison of spin Hall magnetoresistance temperature dependence in YIG/metal systems
The spin Hall magnetoresistance (SHMR) is a recently discovered effect that occurs in a normal metal (NM) that is in contact with a magnetic material. An insulating magnetic material is ideal as it
Operation of a Latching, Low-Loss, Wideband Microwave Phase-Change Switch Below 1 K
We report on the design, fabrication, and demonstration of the operation of a latching (nonvolatile) low-loss microwave switch at 4.2 K and 40 mK using the phase-change material germanium telluride
...
1
2
3
4
5
...

References

SHOWING 1-10 OF 18 REFERENCES
Phase transformation of thin sputter-deposited tungsten films at room temperature
Thin films of W have application in semiconductor interconnect structures as diffusion barriers and potentially as seed layers for electroplating. Thin W films have been deposited by sputtering
Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering
The growth process and the microstructure of very thin W films (80–500 A) deposited by rf sputtering on SiO2 and Si substrates have been observed by transmission electron microscopy (TEM). The
Structure and stability of sputter deposited beta‐tungsten thin films
The structure and stability of thin tungsten films prepared by radio frequency magnetron sputter deposition have been studied by x‐ray diffraction and x‐ray photoelectron spectroscopy. The structure
Performance of photon-number resolving transition-edge sensors with integrated 1550 nm resonant cavities
Many quantum-information applications require high-efficiency, low-noise, single-photon detectors that operate at visible and near-infrared wavelengths. The tunable superconducting critical
SUPERCONDUCTIVITY IN EVAPORATED TUNGSTEN FILMS
Tungsten films were found to be superconducting at 3.2°K. Upon investigation by x‐ray and electron diffraction, a β‐W (A15) structure was evident. Superconducting tunneling studies revealed that the
Strain scaling law for flux pinning in practical superconductors. Part 1: Basic relationship and application to Nb3Sn conductors
Abstract Critical current and flux pinning densities have been determined for a series of Nb3Sn, V3Ga, Nb3Ge, and NbTi conductors as a function of uniaxial tensile strain in magnetic fields ranging
INHOMOGENEOUS STRAIN STATES IN SPUTTER DEPOSITED TUNGSTEN THIN FILMS
The results of an x-ray diffraction study of dc-magnetron sputtered tungsten thin films are reported. It is shown that the phase transformation from the β to α W can cause multilayered single-phase
Detection of single infrared, optical, and ultraviolet photons using superconducting transition edge sensors
We have demonstrated the use of superconducting transition edge sensors for the wide-band detection of individual photons from the mid infrared (IR), through the optical, and into the far ultraviolet
High‐resolution, energy‐dispersive microcalorimeter spectrometer for X‐ray microanalysis
We have developed a prototype X‐ray microcalorimeter spectrometer with high energy resolution for use in X‐ray microanalysis. The microcalorimeter spectrometer system consists of a superconducting
DC SQUID series array amplifiers with 120 MHz bandwidth
We report on the performance of dc SQUID (Superconducting Quantum Interference Device) series array amplifiers from dc to 500 MHz. The arrays consist of up to 100 dc SQUIDs, with varying degrees of
...
1
2
...