Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth

Abstract

UNLABELLED Sintered porous silicon is a well-known seed for homo-epitaxy that enables fabricating transferrable monocrystalline foils. The crystalline quality of these foils depends on the surface roughness and the strain of this porous seed, which should both be minimized. In order to provide guidelines for an optimum foil growth, we present a systematic… (More)
DOI: 10.1186/1556-276X-9-348

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@inproceedings{Karim2014TuningOS, title={Tuning of strain and surface roughness of porous silicon layers for higher-quality seeds for epitaxial growth}, author={Marwa Karim and Roberto Martini and Hariharsudan Sivaramakrishnan Radhakrishnan and Kris van Nieuwenhuysen and Val{\'e}rie Depauw and Wedgan Ramadan and I. A. S. Gordon and Jozef Poortmans}, booktitle={Nanoscale research letters}, year={2014} }