Corpus ID: 237940792

Tuning of Silicon Nitride Micro Cavities by Controlled Nanolayer Deposition

@inproceedings{Kalashnikov2021TuningOS,
  title={Tuning of Silicon Nitride Micro Cavities by Controlled Nanolayer Deposition},
  author={Dmitry A. Kalashnikov and Gandhi Alagappan and Ting Hu and Nelson Lim and Victor Leong and Ching Eng Png and Leonid A. Krivitsky},
  year={2021}
}
Dmitry A. Kalashnikov, Gandhi Alagappan, Ting Hu, Nelson Lim, Victor Leong, Ching Eng Png and Leonid A. Krivitsky Institute of Materials Research and Engineering, Agency for Science, Technology, and Research (A*STAR), 2 Fusionopolis Way, #08-03 Innovis, 138634 Singapore Institute of High Performance Computing, Agency for Science, Technology, and Research (A*STAR), Fusionopolis, 1 Fusionopolis Way, #16-16 Connexis, Singapore 138632 Institute of Microelectronics, Agency for Science, Technology… Expand

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