Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on Ba$_{x}{{\hbox{Sr}}_{1-x}}{\hbox{TiO}}_{3}$ Films

@article{Berge2007TunableSM,
  title={Tunable Solidly Mounted Thin Film Bulk Acoustic Resonators Based on Ba\$_\{x\}\{\{\hbox\{Sr\}\}_\{1-x\}\}\{\hbox\{TiO\}\}_\{3\}\$  Films},
  author={J.. Berge and A. S. Vorobiev and W.. Steichen and S.. Gevorgian},
  journal={IEEE Microwave and Wireless Components Letters},
  year={2007},
  volume={17},
  pages={655-657}
}
Electrically tunable solidly mounted thin film bulk acoustic resonators based on BaxSr1-xTiO3 films are reported for the first time. The films are acoustically isolated from the silicon substrate by a Bragg reflector stack. Applying DC bias induces piezoelectric effect and an acoustic resonance at approximately 4 GHz. Under 10 V applied DC bias the resonance frequency of the resonators based on Ba0.25Sr0.75TiO3 films is tuned 1.2% to lower frequencies. The Q-factor of these resonators is… CONTINUE READING

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